Candi

Pressurized helium is used to transfer a precursor from the shuttle canister to an internal day tank and from this day tank to the tool. The day tank allows for the continuous dispensing of the chemical during a shuttle canister change-out. The patented Candi purge, which uses gas compression and expansion cycles, ensures a safe shuttle canister change-out and prevents the contamination of a supplied precursor often very sensitive to air and moisture.

+ Other patented features, such as the back-up distribution mode, the day tank level control and the empty shuttle canister detection technique for maximum chemical use, ensure a reliable & cost saving distribution of the precursor to the process.

The Candi is qualified by most tool manufacturers for 300-mm processes:

• Referenced on multiple OEMs platforms
• Pre-defined interfacing with multiple OEMs

• On-board vacuum pump
• On-board degassing device
• Pigtails heating
• Up to 4 on-board outlet processes
• Valves Manifold Box (VMB) for distribution to multiple points of use
• Different communication protocols available
• Start-up and operator training

• Fully automatic distribution and canister change-out sequences
• Easy to reach “Emergency Machine Off” button
• Standard exhaust flow alarm
• Optional fire and gas detection alarms
• Leak detection
• Open door detection
• Individual pressure switch and relief valve on N2 and He pressurized lines
• 计时器增压/减压tank, for day tank refill
• Precise alarm messages
• Operator intervention reduced to a minimum
• Multi-level password protection to restrict access to critical functions

• MTBF*: 8,760 hours
• Uptime: 99.98%

*Mean Time Between Failure

Chemical maximum flow rate: 1 slpm when working at Candi maximum pressure of 5 barg

• CE Mark
• SEMI S2 certified
• Atex zone 2 for process compartment